Patent Assignment
Reel/Frame 037952/0433
Assignment of Assignor's Interest
Recorded: 2016-03-11
Pages: 7
Assignors
IKEDA, TARO
Executed: 2016-02-15
KASAI, SHIGERU
Executed: 2016-02-17
HARA, EMIKO
Executed: 2016-02-15
FUJINO, YUTAKA
Executed: 2016-02-15
OSADA, YUKI
Executed: 2016-02-15
NAKAGOMI, JUN
Executed: 2016-02-15
KOMATSU, TOMOHITO
Executed: 2016-02-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Plasma Processing Device with Shower Plate Having Protrusion for Suppressing Film Formation in Gas Holes of Shower Plate