Patent Assignment
Reel/Frame 037955/0025
Assignment of Assignor's Interest
Recorded: 2016-03-11
Pages: 3
Assignors
KOIZUMI, KATSUYUKI
Executed: 2016-03-04
SENZAKI, SHIGERU
Executed: 2016-03-04
TAKAHASHI, TOMOYUKI
Executed: 2016-03-04
KITAGAWA, DAI
Executed: 2016-03-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Control Mechanism, Temperature Control Method and Substrate Processing Apparatus