Patent Assignment
Reel/Frame 037974/0168
Assignment of Assignor's Interest
Recorded: 2016-03-15
Pages: 6
Assignors
JEONG, JI-HOON
Executed: 2016-02-24
OH, JUNG-MIN
Executed: 2016-03-04
LEE, KUN-TACK
Executed: 2016-03-04
LEE, HYO-SAN
Executed: 2016-03-03
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus for Treating Substrates Using Supercritical Fluids, Substrate Treatment System Including the Same and Method of Treating Substrates Using the Same