Patent Assignment
Reel/Frame 037988/0930
Assignment of Assignor's Interest
Recorded: 2016-03-15
Pages: 2
Assignor
MATSUMOTO, HIRONOBU
Executed: 2016-03-07
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Apparatus and Method for Calculating Irradiation Coefficient