Patent Assignment
Reel/Frame 037989/0300
Assignment of Assignor's Interest
Recorded: 2016-03-15
Pages: 3
Assignors
OKUTANI, MANABU
Executed: 2016-01-28
KOBAYASHI, KENJI
Executed: 2016-01-28
YOSHIHARA, NAOHIKO
Executed: 2016-01-28
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method