Patent Assignment
Reel/Frame 037996/0937
Assignment of Assignor's Interest
Recorded: 2016-03-16
Pages: 3
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Methodologies for Rinsing Tool Surfaces in Tools Used to Process Microelectronic Workpieces
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.