Patent Assignment
Reel/Frame 038009/0398
Assignment of Assignor's Interest
Recorded: 2016-03-17
Pages: 3
Assignors
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2012-09-11
DEN BOEF, ARIE JEFFREY
Executed: 2012-09-13
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Position Measuring Apparatus, Position Measuring Method, Lithographic Apparatus and Device Manufacturing Method