Patent Assignment
Reel/Frame 038011/0019
Assignment of Assignor's Interest
Recorded: 2016-03-07
Pages: 3
Assignor
FUNABASHI, NAOKI
Executed: 2015-11-27
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Substrate Holding Device, Lithography Apparatus, and Article Production Method