Patent Assignment
Reel/Frame 038017/0450
Assignment of Assignor's Interest
Recorded: 2016-03-17
Pages: 3
Assignor
SHINOZAKI, HIROYUKI
Executed: 2016-03-11
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus, Method for Controlling the Same, and Method for Outputting a Dressing Condition