Patent Assignment
Reel/Frame 038022/0192
Assignment of Assignor's Interest
Recorded: 2016-03-18
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Tuner, Microwave Plasma Source and Impedance Matching Method