Patent Assignment
Reel/Frame 038036/0920
Assignment of Assignor's Interest
Recorded: 2016-03-18
Pages: 4
Assignors
SAKIYAMA, YUKINORI
Executed: 2016-03-01
KARIM, ISHTAK
Executed: 2016-03-14
RANGINENI, YASWANTH
Executed: 2016-03-04
LAVOIE, ADRIEN
Executed: 2016-03-02
CHANDRASEKHARAN, RAMESH
Executed: 2016-03-01
AUGUSTYNIAK, EDWARD
Executed: 2016-03-15
KEIL, DOUGLAS
Executed: 2016-03-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Detection of Plasma Instability by Electrical Measurement