Patent Assignment
Reel/Frame 038037/0291
Assignment of Assignor's Interest
Recorded: 2016-03-18
Pages: 2
Assignors
SAKIYAMA, YUKINORI
Executed: 2016-03-18
AUGUSTYNIAK, EDWARD
Executed: 2016-03-18
KEIL, DOUGLAS
Executed: 2016-03-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Detection of Plasma Instability by Optical Diagnosis