Patent Assignment
Reel/Frame 038081/0319
Assignment of Assignor's Interest
Recorded: 2016-03-23
Pages: 6
Assignors
LIKHANSKII, ALEXANDRE
Executed: 2016-03-18
RADOVANOV, SVETLANA B.
Executed: 2016-03-18
LEE, WILLIAM DAVIS
Executed: 2016-03-19
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Multi-Aperture Extraction System for Angled Ion Beam