Patent Assignment
Reel/Frame 038091/0333
Assignment of Assignor's Interest
Recorded: 2016-03-24
Pages: 3
Assignor
ENDRES, MARTIN
Executed: 2016-03-22
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System and Illumination Optical Unit for Euv Projection Lithography