Patent Assignment
Reel/Frame 038093/0043
Assignment of Assignor's Interest
Recorded: 2016-03-24
Pages: 7
Assignors
KAMIMURA, DAIGI
Executed: 2016-01-25
ODAKE, SHIGERU
Executed: 2016-01-28
TANIYAMA, TOMOSHI
Executed: 2016-01-28
NOGAMI, TAKASHI
Executed: 2016-01-25
MORITA, OSAMU
Executed: 2016-01-25
KOMAE, YASUAKI
Executed: 2016-01-25
Assignee
HITACHI KOKUSAI ELECTRIC INC
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.