Patent Assignment
Reel/Frame 038102/0174
Assignment of Assignor's Interest
Recorded: 2016-03-25
Pages: 5
Assignors
YAMAGUCHI, DAIGO
Executed: 2016-03-17
KAMAKURA, TSUKASA
Executed: 2016-03-18
ASHIHARA, HIROSHI
Executed: 2016-03-18
TAKEDA, TSUYOSHI
Executed: 2016-03-18
SATO, TAKETOSHI
Executed: 2016-03-18
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.