Patent Assignment
Reel/Frame 038114/0568
Assignment of Assignor's Interest
Recorded: 2016-03-28
Pages: 2
Assignors
KURATA, MOTOMU
Executed: 2016-03-10
HODO, RYOTA
Executed: 2016-03-10
IIDA, YUTA
Executed: 2016-03-10
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device Including Step Of Simultaneous Formation Of Plurality Of Contact Openings