Patent Assignment
Reel/Frame 038119/0376
Assignment of Assignor's Interest
Recorded: 2016-03-29
Pages: 11
Assignors
TERAMOTO, YUSUKE
Executed: 2016-03-10
URAKAMI, HIDEYUKI
Executed: 2016-03-11
NAGANO, AKIHISA
Executed: 2016-03-10
Assignee
USHIO DENKI KABUSHIKI KAISHA
2-6-1, OTE-MACHI, CHIYODA-KU, TOKYO, 100-8150, JAPAN
Covered Property
(1)
Device for Emitting Extreme Ultraviolet Light