Patent Assignment
Reel/Frame 038121/0984
Assignment of Assignor's Interest
Recorded: 2016-03-29
Pages: 7
Assignors
SINGH, SUNIL KUMAR
Executed: 2012-06-15
LEE, CHUNG-JU
Executed: 2012-06-15
BAO, TIEN-I
Executed: 2012-06-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Etch Damage and Esl Free Dual Damascene Metal Interconnect