Patent Assignment
Reel/Frame 038127/0041
Assignment of Assignor's Interest
Recorded: 2016-03-29
Pages: 5
Assignors
FUCHS, ANDREAS
Executed: 2015-01-05
WARDENIER, PETER HANZEN
Executed: 2015-01-05
SINGH, AMANDEV
Executed: 2015-01-06
D'ALFONSO, MAXIME
Executed: 2015-01-06
BOS, HILKO DIRK
Executed: 2016-02-23
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring Asymmetry, Inspection Apparatus, Lithographic System and Device Manufacturing Method