Patent Assignment
Reel/Frame 038140/0157
Assignment of Assignor's Interest
Recorded: 2016-03-30
Pages: 2
Assignors
HARA, SHIRO
Executed: 2016-03-07
KHUMPUANG, SOMMAWAN
Executed: 2016-03-07
IKEDA, SHINICHI
Executed: 2016-03-07
Assignee
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
3-1, KASUMIGASEKI 1-CHOME, CHIYODA-KU,, TOKYO, 100-8921, JAPAN
Covered Property
(1)
Process Substrate with Crystal Orientation Mark, Method of Detecting Crystal Orientation, and Reading Device of Crystal Orientation Mark