Patent Assignment
Reel/Frame 038146/0416
Assignment of Assignor's Interest
Recorded: 2016-03-31
Pages: 11
Assignors
NODA, TAKAAKI
Executed: 2016-02-29
NOHARA, SHINGO
Executed: 2016-03-02
SHIMAMOTO, SATOSHI
Executed: 2016-02-29
ASHIHARA, HIROSHI
Executed: 2016-02-29
HANASHIMA, TAKEO
Executed: 2016-03-01
HIROSE, YOSHIRO
Executed: 2016-03-01
KAMAKURA, TSUKASA
Executed: 2016-02-29
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.