Patent Assignment
Reel/Frame 038160/0400
Assignment of Assignor's Interest
Recorded: 2016-03-31
Pages: 8
Assignors
KAMAKURA, TSUKASA
Executed: 2016-03-17
NODA, TAKAAKI
Executed: 2016-03-17
HIROSE, YOSHIRO
Executed: 2016-03-17
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application:
15/085,459 →
Publication:
US 2016/0322212
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.