Patent Assignment
Reel/Frame 038166/0464
Assignment of Assignor's Interest
Recorded: 2016-03-31
Pages: 2
Assignors
TAKAYAMA, TORU
Executed: 2002-10-24
MARUYAMA, JUNYA
Executed: 2002-10-24
YAMAZAKI, SHUNPEI
Executed: 2002-10-24
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Peeling Method and Method of Manufacturing Semiconductor Device