Patent Assignment
Reel/Frame 038168/0101
Assignment of Assignor's Interest
Recorded: 2016-04-01
Pages: 6
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Novel Patterning Approach for Improved via Landing Profile