Patent Assignment
Reel/Frame 038174/0157
Assignment of Assignor's Interest
Recorded: 2016-04-01
Pages: 5
Assignors
MATSUMOTO, HIROIE
Executed: 2016-04-01
METZ, ANDREW W
Executed: 2016-03-31
FEURPRIER, YANNICK
Executed: 2016-03-31
LUTKER-LEE, KATIE
Executed: 2016-03-31
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Trench and Hole Patterning with Euv Resists Using Dual Frequency Capacitively Coupled Plasma (Ccp)