Patent Assignment
Reel/Frame 038184/0945
Assignment of Assignor's Interest
Recorded: 2016-04-04
Pages: 3
Assignors
RALEY, ANGELIQUE D.
Executed: 2016-04-04
MOHANTY, NIHAR
Executed: 2016-04-04
KO, AKITERU
Executed: 2016-04-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Increasing Pattern Density in Self-Aligned Patterning Schemes Without Using Hard Masks