Patent Assignment
Reel/Frame 038190/0256
Assignment of Assignor's Interest
Recorded: 2016-04-05
Pages: 5
Assignors
NAGATOMO, YU
Executed: 2016-03-28
ISHITA, RYUUU
Executed: 2016-04-01
TAMURA, DAISUKE
Executed: 2016-03-28
KOIWA, KOUSUKE
Executed: 2016-03-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method