Patent Assignment
Reel/Frame 038191/0875
Assignment of Assignor's Interest
Recorded: 2016-03-22
Pages: 4
Assignors
GRUNER, TORALF
Executed: 2016-03-03
WEISS, ROBERT
Executed: 2016-03-09
HOLZMANN, JOERG
Executed: 2016-03-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus and Method of Correcting Optical Wavefront Deformations in Such an Apparatus