Patent Assignment
Reel/Frame 038202/0215
Assignment of Assignor's Interest
Recorded: 2016-04-06
Pages: 4
Assignors
CHO, TAE SEUNG
Executed: 2016-03-17
KIM, JUNGHOON
Executed: 2016-03-17
JUNG, SOONWOOK
Executed: 2016-03-17
PARK, SOONAM
Executed: 2016-03-17
LUBOMIRSKY, DMITRY
Executed: 2016-03-17
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
In-Situ Spatially Resolved Plasma Monitoring by Using Optical Emission Spectroscopy