Patent Assignment
Reel/Frame 038207/0518
Assignment of Assignor's Interest
Recorded: 2016-04-06
Pages: 3
Assignors
OR, DAVID T.
Executed: 2013-09-26
COLLINS, JOSHUA
Executed: 2013-09-21
CHANG, MEI
Executed: 2013-09-26
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Directional SIO2 Etch Using Plasma Pre-Treatment and High-Temperature Etchant Deposition