Patent Assignment
Reel/Frame 038209/0331
Assignment of Assignor's Interest
Recorded: 2016-04-06
Pages: 8
Assignors
CHEN, XINGLONG
Executed: 2014-05-07
GARG, SAURABH
Executed: 2014-05-05
YANG, JANG-GYOO
Executed: 2014-07-24
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Rps Assisted Rf Plasma Source for Semiconductor Processing