Patent Assignment
Reel/Frame 038214/0838
Assignment of Assignor's Interest
Recorded: 2016-04-07
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Energetic Negative Ion Impact Ionization Plasma