Patent Assignment
Reel/Frame 038219/0642
Assignment of Assignor's Interest
Recorded: 2016-04-07
Pages: 8
Assignors
ZHAO, JIANPING
Executed: 2016-04-07
CHEN, LEE
Executed: 2016-04-07
LANE, BARTON G.
Executed: 2016-04-07
FUNK, MERRITT
Executed: 2016-04-07
SUNDARARAJAN, RADHA
Executed: 2016-04-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Generation and Control Using a DC Ring