Patent Assignment
Reel/Frame 038221/0187
Assignment of Assignor's Interest
Recorded: 2016-04-07
Pages: 4
Assignor
ICHINOSE, GO
Executed: 2015-12-21
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Substrate Holding Method, Substrate Holding Apparatus, Exposure Apparatus and Exposure Method