Patent Assignment
Reel/Frame 038221/0247
Assignment of Assignor's Interest
Recorded: 2016-04-07
Pages: 7
Assignors
GIRARD, JEAN-MARC
Executed: 2016-02-11
KO, CHANGHEE
Executed: 2016-02-04
OSCHEPKOV, IVAN
Executed: 2016-02-09
YANIGITA, KAZUTAKA
Executed: 2016-02-03
OKUBO, SHINGO
Executed: 2016-02-09
NODA, NAOTO
Executed: 2016-02-09
GATINEAU, JULIEN
Executed: 2016-02-11
Assignee
L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Vapor Deposition of Silicon-Containing Films Using Penta-Substituted Disilanes