Patent Assignment
Reel/Frame 038224/0203
Assignment of Assignor's Interest
Recorded: 2016-04-08
Pages: 3
Assignor
SAITO, NOBUYUKI
Executed: 2015-12-24
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus, and Method of Manufacturing Device