Patent Assignment
Reel/Frame 038243/0661
Assignment of Assignor's Interest
Recorded: 2016-04-11
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Using Sub-Resolution Openings to Aid in Image Reversal, Directed Self-Assembly, and Selective Deposition