Patent Assignment
Reel/Frame 038254/0913
Assignment of Assignor's Interest
Recorded: 2016-04-12
Pages: 3
Assignors
FUJIMURA, AKIRA
Executed: 2016-03-25
HAGIWARA, KAZUYUKI
Executed: 2016-03-30
MEIER, STEPHEN F.
Executed: 2016-03-30
BORK, INGO
Executed: 2016-04-07
Assignee
D2S, INC.
4040 MOORPARK AVENUE, #250, SAN JOSE, CALIFORNIA, 95117
Covered Property
(1)
Method and System for Design of Enhanced Edge Slope Patterns for Charged Particle Beam Lithography