Patent Assignment
Reel/Frame 038255/0691
Assignment of Assignor's Interest
Recorded: 2016-04-12
Pages: 3
Assignors
LILL, THORSTEN
Executed: 2016-02-24
BERRY, IVAN L., III
Executed: 2016-02-24
RICCI, ANTHONY
Executed: 2016-02-24
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Ion Beam Etching Utilizing Cryogenic Wafer Temperatures