Patent Assignment
Reel/Frame 038257/0592
Assignment of Assignor's Interest
Recorded: 2016-04-12
Pages: 3
Assignor
VAN DER WILT, PAUL
Executed: 2014-04-14
Assignee
COHERENT LASERSYSTEMS GMBH & CO. KG
HANS BÖCKLER-STRASSE 12, GÖTTINGEN, D-37079, GERMANY
Covered Property
(1)
Monitoring Method and Apparatus for Control of Excimer Laser Annealing