Patent Assignment
Reel/Frame 038269/0039
Assignment of Assignor's Interest
Recorded: 2016-04-13
Pages: 3
Assignor
MIKAMI, SHUNICHI
Executed: 2016-04-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method, Pattern Forming Method and Cleaning Method