Patent Assignment
Reel/Frame 038285/0740
Assignment of Assignor's Interest
Recorded: 2016-04-14
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Using Heated Substrates for Process Chemistry Control