Patent Assignment
Reel/Frame 038316/0445
Assignment of Assignor's Interest
Recorded: 2016-04-19
Pages: 7
Assignors
LAFARRE, RAYMOND WILHELMUS LOUIS
Executed: 2012-12-05
DZIOMKINA, NINA VLADIMIROVNA
Executed: 2012-10-29
KARADE, YOGESH PRAMOD
Executed: 2012-10-29
RODENBURG, ELISABETH CORINNE
Executed: 2012-11-01
VAN DELFT, PETER
Executed: 2012-12-05
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, and Method of Manufacturing a Substrate Holder