Patent Assignment
Reel/Frame 038365/0690
Assignment of Assignor's Interest
Recorded: 2016-04-25
Pages: 3
Assignors
KIHARA, YOSHIHIDE
Executed: 2016-04-18
OISHI, TOMOYUKI
Executed: 2016-04-19
HISAMATSU, TORU
Executed: 2016-04-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Processing Target Object