Patent Assignment
Reel/Frame 038396/0090
Assignment of Assignor's Interest
Recorded: 2016-04-27
Pages: 6
Assignors
OKUTANI, MANABU
Executed: 2016-04-25
UMEZAKI, TOMONORI
Executed: 2016-04-15
KIKUCHI, AKIOU
Executed: 2016-04-15
Assignees
SCREEN HOLDINGS CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
CENTRAL GLASS COMPANY, LIMITED
5253, OAZA OKIUBE, UBE-SHI, YAMAGUCHI, 755-0001, JAPAN
Covered Property
(1)
Sacrificial-Film Removal Method and Substrate Processing Device