Patent Assignment
Reel/Frame 038445/0183
Assignment of Assignor's Interest
Recorded: 2016-05-03
Pages: 6
Assignors
BUDACH, MICHAEL
Executed: 2016-04-26
SCHÖNBERGER, RALF
Executed: 2016-04-25
JÖST, MICHAEL
Executed: 2016-04-25
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Device for Determining a Reference Point of an Orientation Marking on a Substrate of a Photolithographic Mask in an Automated Manner