Patent Assignment
Reel/Frame 038507/0171
Assignment of Assignor's Interest
Recorded: 2016-05-09
Pages: 8
Assignors
SOCHA, ROBERT JOHN
Executed: 2013-01-11
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2013-01-11
TINNEMANS, PATRICIUS ALOYSIUS JACOBUS
Executed: 2013-01-11
VAESSEN, JEAN-PIERRE AGNES HENRICUS MARIE
Executed: 2013-01-11
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Inspection Method and Apparatus, Lithographic System and Device Manufacturing Method