Patent Assignment
Reel/Frame 038517/0060
Assignment of Assignor's Interest
Recorded: 2016-05-09
Pages: 6
Assignors
ISHIDA, SEIKI
Executed: 2016-04-27
FUKUI, SHOGO
Executed: 2016-04-26
SHINOHARA, HIDETAKA
Executed: 2016-04-26
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Storage Medium