Patent Assignment
Reel/Frame 038518/0970
Assignment of Assignor's Interest
Recorded: 2016-05-09
Pages: 4
Assignors
HATAKEYAMA, JUN
Executed: 2016-03-24
WATANABE, TAKERU
Executed: 2016-03-25
KORI, DAISUKE
Executed: 2016-03-24
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Under Layer Film Composition and Patterning Process